Nanometrics Announces Expansion of IMPULSE+ Integrated Metrology into 3D-NAND Interconnect Process Control
NANOMETRICS (NANO)
Last nanometrics earnings: 7/30 04:05 pm
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Source: GlobeNewswire
MILPITAS, Calif., Dec. 04, 2017 (GLOBE NEWSWIRE) -- Nanometrics Incorporated (NASDAQ:NANO), a leading provider of advanced process control systems, today announced that its IMPULSE®+ integrated metrology platform has been adopted into key interconnect process control applications by multiple 3D-NAND customers. The IMPULSE+ has already been broadly deployed for 3D-NAND memory cell control, and is now being adopted for advanced interconnect control on those devices. With this expansion, the IMPULSE+ with NanoDiffract® software is supporting high-volume manufacturing across all key steps in 3D-NAND production at multiple customers and factories. “The IMPULSE+ supports the high throughput and precision needed for advanced interconnect applications,” commented Nir Ben-Moshe, senior director of integrated metrology solutions at Nanometrics. “Our systems are qualified on the leading chemical mechanical polishing (CMP) systems, providing rapid feedback for advanced process control. After
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