Nanometrics Introduces SpectraProbe Analysis Software
NANOMETRICS (NANO)
Last nanometrics earnings: 7/30 04:05 pm
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Source: GlobeNewswire
MILPITAS, Calif., July 11, 2017 (GLOBE NEWSWIRE) -- Nanometrics Incorporated (NASDAQ:NANO), a leading provider of advanced process control systems, today announced the introduction of SpectraProbe™, a new software-based process control solution designed to provide advanced data analytics to maximize fab productivity. Complementing the high-fidelity modeling capabilities of NanoDiffract® for optical critical dimension (OCD) metrology, SpectraProbe analyzes data generated by a customer’s fleet of Nanometrics Atlas®, IMPULSE® and T3 metrology systems, providing real-time excursion monitoring, rapid model-less OCD recipe analysis and tracking of other process parameters. When combined with patented Atlas full Mueller matrix data set and SpectraProbe machine learning algorithms, a unique model-less recipe mode has been developed for 3D-NAND channel hole etch tilt measurement. “Not only are we be able to reduce time to solution from days to minutes, SpectraProbe measurements can be done
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